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Tomomi Kanazawa

National Institute of Advanced Industrial Science and Technology

5

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17

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Reactive ion etching of FePt using inductively coupled plasma

2008 Applied Surface Science
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Inductively coupled plasma-reactive ion etching for β-FeSi2 film

2007 Thin Solid Films
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Reactive Ion Etching of NiFe Film with Organic Resist Mask and Metal Mask by Inductively Coupled Plasma

2007 Journal of Magnetics
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Highly selective reactive-ion etching for NiFe with Ti mask by inductively coupled plasma

2007 Journal of Magnetism and Magnetic Materials
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Reactive Ion Etching of β-FeSi2 with Inductively Coupled Plasma

2006 Japanese Journal of Applied Physics
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