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Shimpei Hijiya
Shimpei Hijiya
Dry etching
Electronic engineering
Leakage (electronics)
Computer science
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Photo-excited dry cleaning for ULSI devices
1991
VLSI-TSA | International Symposium on VLSI Technology, Systems, and Applications
Yasuhisa Sato
Rinshi Sugino
Masaki Okuno
Nobuo Kikuchi
Jun-ichi Teramae
Akinao Ogawa
Shimpei Hijiya
Takashi Ito
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