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Zhida Wang
Zhida Wang
Kyushu University
Slurry
Dispersion (chemistry)
Surface roughness
Elutriation
Lapping
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Characteristic of SiC Slurry in Ultra Precision Lapping of Sapphire Substrates
2021
International Journal of Precision Engineering and Manufacturing
Yin Tao
Zhida Wang
Toshiro Doi
Syuhei Kurokawa
Zhe Tan
Xiaokang Ding
Huan Lin
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