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Hervé Gris
Hervé Gris
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Metrology
Semiconductor device fabrication
Engineering
Mathematical model
Virtual metrology
2
Papers
28
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Virtual Metrology Modeling for CVD Film Thickness
2012
Jerome Besnard
Dietmar Gleispach
Hervé Gris
Ariane Ferreira
Agnès Roussy
Christelle Kernaflen
Günter Hayderer
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Citations (20)
Virtual metrology models for predicting avera PECVD oxide film thickne
2011
ASMC | Advanced Semiconductor Manufacturing Conference
Ariane Ferreira
A. Roussy
Christelle Kernaflen
Dietmar Gleispach
Günter Hayderer
Hervé Gris
Jerome Besnard
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Citations (8)
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