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Ruslie
Ruslie
Nanyang Technological University
Biasing
Chemical vapor deposition
Raman scattering
Raman spectroscopy
Analytical chemistry
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Amorphous carbon film deposition using a DC-biased screen-grid in an electron cyclotron resonance plasma
1998
Vacuum
S.F. Yoon
Ruslie
J. Ahn
Q. Zhang
Ys Wu
H. Yang
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