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Alicja Lesniewska
Alicja Lesniewska
IMEC
Materials science
Metallurgy
Dielectric
Plasma-enhanced chemical vapor deposition
Dielectric strength
5
Papers
10
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Toward successful integration of gap-filling ultralow-k dielectrics
2016
IITC | International Interconnect Technology Conference
L. Zhang
J.-F. de Marneffe
Alicja Lesniewska
P. Verdonck
Nancy Heylen
G. Murdoch
Kristof Croes
Zs. Tokei
Jürgen Bömmels
S. Lefferts
S. De Gendt
Mikhail R. Baklanov
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Cobalt UBM for fine pitch microbump applications in 3DIC
2015
IITC | International Interconnect Technology Conference
Jaber Derakhshandeh
Inge De Preter
Kevin Vandersmissen
Dries Dictus
Luca Di Piazza
Lin Hou
Stefano Guerrieri
George Vakanas
Silvia Armini
Robert Daily
Alicja Lesniewska
Yannick Vandelaer
Myriam Van de Peer
John Slabbekoorn
Kenneth June Rebibis
Andy Miller
Gerald Beyer
Eric Beyne
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Optimized pore stuffing for enhanced compatibility with interconnect integration flow
2015
IITC | International Interconnect Technology Conference
J.-F. de Marneffe
L. Zhang
Vito Rutigliani
G. Noya
Y Cao
Alicja Lesniewska
Olalla Varela Pedreira
Kristof Croes
C. Gillot
Zsolt Tokei
J. Boemmels
Mikhail R. Baklanov
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Citations (1)
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