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M. Obata
M. Obata
JEOL Ltd.
Nanotechnology
In situ
Ion
Materials science
Etching
2
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Recent Applications Of Finely Focused Eb/Ib Tecindlogies For Multichamber And In-Situ Processing
1990
H. Sawaragi
H. Kasahara
R. Mimura
M. Obata
R. Aihara
W. Thompson
M. H. Shearer
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