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V. Yu. Kireev
V. Yu. Kireev
National Research University of Electronic Technology
Materials science
Inorganic chemistry
Analytical chemistry
Ellipsometry
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5
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5
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Research of the Possibility to Obtain Structures with Nanometer Layer Thicknesses and Sharp-Cut Interfaces between Them Using Ion-Beam and Reactive Ion-Beam Deposition Processes
2019
Nanotechnologies in Russia
A. A. Dedkova
V. Yu. Kireev
A. S. Myslivets
P. A. Rozel
A. Yu. Trifonov
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INVESTIGATION OF GALLIUM NITRIDE ISLAND FILMS ON SAPPHIRE SUBSTRATES VIA SCANNING ELECTRON MICROSCOPY AND SPECTRAL ELLIPSOMETRY
2019
Nanotechnologies in Russia
A. A. Dedkova
M. O. Nikiforov
S. V. Mitko
V. Yu. Kireev
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Study of the Effect of Laser Radiation on the Parameters of Alumina Films Formed by Atomic Layer Deposition
2018
Nanotechnologies in Russia
A. A. Dedkova
N. A. Dyuzhev
V. Yu. Kireev
I. E. Klemente
A. V. Myakon’kikh
K. V. Rudenko
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Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices
2017
Nanotechnologies in Russia
N. A. Dyuzhev
Evgeney E. Gusev
Tatiana A. Gryazneva
A. A. Dedkova
D.A. Dronova
V. Yu. Kireev
E. P. Kirilenko
D.M. Migunov
D. V. Novikov
N. N. Patyukov
A.A. Presnukhina
A D Bakun
D. S. Ermakov
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Analytical model of plasma-chemical etching in planar reactor
2016
D.S. Veselov
A D Bakun
Yu.A. Voronov
V. Yu. Kireev
O V Vasileva
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