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W. Ilerch
W. Ilerch
Materials science
Engineering physics
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RTP-grown oxynitride layers meet gate challenges
2004
Hin Yiu Chung
J. Niess
W. Dietl
Georg Roters
W. Ilerch
Zsolt Nenyei
A. Ludsteck
J. Schulze
I. Eisele
Karsten Wieczorek
N. Krumm
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