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Masahiro Shiroki
Masahiro Shiroki
Analytical chemistry
Titanium
Microfluidics
Plasma etching
Chemistry
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Development of Titanium Micro Mold Manufacturing Technology for the Microfluidic Chip by Plasma Etching
2017
Journal of The Vacuum Society of Japan
Takeshi Hitobo
Masahiro Shiroki
Hirofumi Nabesawa
Toyohisa Asaji
Takashi Abe
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