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Xuelong Shi
Xuelong Shi
Algorithm
Feature vector
Computational lithography
Computer science
Coulomb
2
Papers
23
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2024
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Optimal feature vector design for computational lithography
2019
Xuelong Shi
Yuhang Zhao
Shoumian Cheng
Ming Li
Wei Yuan
Leon Yao
Wenhao Zhao
Yanjun Xiao
Xiaohui Kang
Angmar Li
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Effect of Coulomb interaction and pKa on acid diffusion in chemically amplified resists
1999
Journal of Vacuum Science & Technology B
Xuelong Shi
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Citations (22)
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