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Hyun-ji Ha
Hyun-ji Ha
Samsung
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Electronic engineering
Photolithography
Computer science
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Study on the use of RET for improvement of dof in sub-via contact holes to severe topography
2012
ICM | International Conference on Microelectronics
Jung Ho Park
Hyun-ji Ha
Yong-hwan Jang
Inkyu Moon
Chang-hwan Jung
Yeon-ho Lee
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