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Elke Eckstein
Elke Eckstein
Isotropic etching
Tungsten
Silicon
Materials science
Composite material
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A method for isotropic etching of silicon, which is highly selective to tungsten
1996
Elke Eckstein
Birgit Hoffman
Edward W. Kiewra
Waldemar Walter Kocon
Mark Jay Weiss
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