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Chun-Hsi Su
Chun-Hsi Su
Chemical species
Nanocrystalline material
Diamond
Chemical vapor deposition
Plasma processing
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An Investigation of Chemical Species and Electrical Property of Nitrogen-Doped Nanocrystalline Diamond Films Grown by Microwave Plasma Jet Chemical Vapor Deposition
2009
Japanese Journal of Applied Physics
Chun-Hsi Su
Ching-yü Chang
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