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Naoki Miyamoto

Doshisha University

7

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Development of a Polyatomic Molecular Ion Source with a Hollow Cathode

2018
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Space Charge Neutralization by a Microwave Linear Antenna Plasma Flood Gun

2018
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Particle detection in a transport region of an ion implantation apparatus

2014
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Implementation of converging ion beam to prepare functional thin film materials

2013
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Development of a Bernas-type ion source with an AC current driven filament cathode

2012
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Plasma excitation by RF power and extraction of negative ions from produced plasmas

2012
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Erosion of Extraction Electrodes of Ion Sources due to Sputtering

2011
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Citations (3)