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Dong Heok Park
Dong Heok Park
SK Hynix
Lithography
Optics
Semiconductor device fabrication
Immersion lithography
Offset (computer science)
2
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1
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Development of new BARC for immersion process using hyper NA
2008
Proceedings of SPIE
Hyo Jung Roh
Man-Ho Han
Sang Jeoung Kim
Hyun-Jin Kim
Jae Hyun Kim
Keun-Kyu Kong
Ki Lyoung Lee
Sung Koo Lee
Dong Heok Park
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