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M. R. Timerov
M. R. Timerov
Barrier layer
Organic Silicon Compounds
Etching
Analytical chemistry
Lithography
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The silylation processes for positive and negative deep ultraviolet resists
1990
Journal of Vacuum Science & Technology B
S. M. Sviridov
M. R. Timerov
KamilA. Valiev
Leonid V. Velikov
D. Yu. Zaroslov
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Citations (4)
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