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Angelo Santalucia
Angelo Santalucia
Optoelectronics
Fabrication
Miniaturization
Scattering
Microelectromechanical systems
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A Stochastic Model to Describe the Scattering in the Response of Polysilicon MEMS
2021
Luca Dassi
Marco Merola
Eleonora Riva
Angelo Santalucia
Andrea Venturelli
Aldo Ghisi
Stefano Mariani
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