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Chi-Jen Liu
Chi-Jen Liu
Dry etching
Isotropic etching
Plasma etcher
Reactive-ion etching
Architecture
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Etching Characteristics of Organic Low-k Dielectrics in the Helicon-wave Plasma Etcher for 0.15 μm Damascene Architecture.
2000
Jia-Min Shieh
Tzu-Chien Wei
Chi-Jen Liu
Shich-Chang Suen
Bau-Tong Dai
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