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P. Li
P. Li
Tohoku University
Actuator
Silicon on insulator
Microlens
Comb drive
Wafer
2
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17
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Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer.
2012
Optics Express
P. Li
Takashi Sasaki
Longfa Pan
Kazuhiro Hane
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Citations (16)
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