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Isao Miyata
Isao Miyata
Inorganic chemistry
Chemistry
Analytical chemistry
Etching
Reactive-ion etching
2
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5
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Etching Uniformities of Silicon in CF 4 + 4 % O 2 Plasma
1979
Journal of The Electrochemical Society
Masanobu Doken
Isao Miyata
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Citations (5)
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