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M. Savoye
M. Savoye
Materials science
Electronic engineering
Electrical engineering
Piezoresistive effect
Microfabrication
2
Papers
34
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3-Axis gyroscope with Si nanogage piezo-resistive detection
2012
MEMS | International Conference on Micro Electro Mechanical Systems
Arnaud Walther
M. Savoye
Guillaume Jourdan
P Renaux
Frédéric Souchon
Ph. Robert
C. Le Blanc
Nicolas Delorme
O. Gigan
C Lejuste
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Citations (27)
A new low consumption 3D compass using integrated magnets and piezoresistive nano-gauges
2011
TRANSDUCERS | International Conference on Solid-State Sensors, Actuators and Microsystems
Dirk Ettelt
Patrice Rey
M. Savoye
C. Coutier
M Cartier
Olivier Redon
M. Audoin
Arnaud Walther
Philippe Robert
Yuepeng Zhang
Frédéric Dumas-Bouchiat
Nora Dempsey
Jérôme Delamare
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Citations (7)
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