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Zsolt Nenyei
Zsolt Nenyei
Analytical chemistry
Materials science
Pyrometer
Electronic engineering
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6
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15
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Apparatus and method for producing dielectric layers in the microwave plasma
2008
Alexander Gschwandtner
Wilfried Lerch
Zsolt Nenyei
Thomas Dr. Theiler
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Procédé et système pour traiter thermiquement une pluralité d'objets en forme de tranches
2008
Zsolt Nenyei
Paul Janis Timans
Wilfried Lerch
J. Niess
Manfred Falter
Conor Patrick Ocarroll
Rudy Santo Tomas Cardema
Igor Fidelman
Sing Pin Tay
Yao Zhi Hu
Daniel J. Devine
Patrick Schmid
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Characterization and minimization of moisture concentration in atmospheric pressure RTP tools, using an in situ absorption spectroscopy sensor
2001
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Thomas Graf
K Meyer
Zsolt Nenyei
W. Lerch
R. Inman
J. McAndrew
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A method for wavevector selective pyrometry in rapid heating systems
1994
Zsolt Nenyei
Andreas Tillmann
Heinrich Walk
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Method and apparatus for selective wave vector pyrometry in rapid heating systems
1994
Zsolt Nenyei
Andreas Tillmann
Heinrich Walk
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Defect‐Guarded Rapid Thermal Processing
1993
Journal of The Electrochemical Society
Zsolt Nenyei
Heinrich Walk
Thomas Knarr
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Citations (15)
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