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Sebastien Mougel
Sebastien Mougel
STMicroelectronics
Wafer
Optics
Semiconductor device fabrication
Ion implantation
Coating
2
Papers
11
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Evaluation of wet-developable KrF organic BARC to improve CD uniformity for implant application
2004
Isabelle Guilmeau
Alice F. Guerrero
Vincent Blain
Stephanie Kremer
Vincent Vachellerie
Damien Lenoble
Patricia Nogueira
Sebastien Mougel
Jean-Damien Chapon
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Citations (8)
Impact of synchronization errors on overlay and CD control
2002
Emmanuelle Luce
Sebastien Mougel
Pierre-Jerome Goirand
Jerome Depre
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Citations (3)
1