Old Web
English
Sign In
Acemap
>
authorDetail
>
Tim Weidman
Tim Weidman
Analytical chemistry
Chemical vapor deposition
Photoresist
Plasma processing
Ultraviolet
1
Papers
4
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Single layer chemical vapor deposition photoresist for 193 nm deep ultraviolet photolithography
1998
Journal of Vacuum Science & Technology B
Mike Nault
Tim Weidman
Dian Sugiarto
David Mui
Carol Y. Lee
John Yang
Show All
Source
Cite
Save
Citations (4)
1