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Kyeong Keun Choi
Kyeong Keun Choi
SK Hynix
Composite material
Materials science
Dry etching
Nanotechnology
Etching (microfabrication)
2
Papers
1
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0
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The effect of Ta diffusion barrier coverage at via sidewall on the reliability of via
2006
Won-Chong Baek
Jayhoon Chung
Paul S. Ho
Jeong-Gun Lee
Sung Bo Hwang
Kyeong Keun Choi
Oh Jin Jung
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Integration using inorganic BARC in a via first dual-damascene process with low-k dielectric
2004
Jun Kyu Ahn
Seon Ho Choi
Young Keun Kim
Ki Yeop Park
Jae Sung Choi
Eun Suk Hong
Kang Sup Shin
Si Bum Kim
Kyeong Keun Choi
Sung Bo Hwang
Jeong Gun Lee
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