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Zhang Zhongshan
Zhang Zhongshan
Chinese Academy of Sciences
Nanostructure
Fabrication
Atomic layer deposition
Lithography
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Precise tailoring of multiple nanostructures based on atomic layer assembly via versatile soft-templates
2021
Nano Today
Geng Guangzhou
Wei Zhu
Ruhao Pan
Zhang Zhongshan
Changzhi Gu
Junjie Li
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