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E. Kobayashi
E. Kobayashi
Hosei University
Oxygen
Annealing (metallurgy)
Auger electron spectroscopy
Ion
Analytical chemistry
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Annealing of Se‐implanted GaAs with an oxygen‐free CVD Si3N4 encapsulant
1978
Journal of Applied Physics
Taroh Inada
H. Miwa
Shigeki Kato
E. Kobayashi
Tohru Hara
M. Mihara
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