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Y. Kokubo
Y. Kokubo
Hosei University
Crystallization
Ion beam
Crystallinity
Epitaxy
Annealing (metallurgy)
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Regrowth characteristics of SiGe/Si by IBIEC and SPEG
2013
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
K. Awane
Y. Kokubo
M. Yomogida
Tomoaki Nishimura
Yasuhiro Yamamoto
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