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Suda Yoshiaki
Suda Yoshiaki
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金属と金属酸化物粉末ターゲットを用いたマグネトロンスパッタリング蒸着によるSnドープSiO 2 薄膜の作製
2019
Japanese Journal of Applied Physics
Kawasaki Hiroharu
Ohshima Tamiko
Yagyu Yoshihito
Ihara Takeshi
Shinohara Masanori
Suda Yoshiaki
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