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Natale Pruiti
Natale Pruiti
Silicon nitride
Thermo-optic coefficient
Plasma-enhanced chemical vapor deposition
Silicon
Optics
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Thermo-optic coefficient of PECVD silicon-rich silicon nitride
2020
Optics Letters
Natale Pruiti
Charalambos Klitis
Christopher Gough
Stuart May
Marc Sorel
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