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Е. Pilyuk
Е. Pilyuk
Nitride
Coating
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Annealing (metallurgy)
Cathode
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The effect of vacuum annealing on the structure and properties of the electrically conductive a-CN coating
2020
Vacuum
A. Poplavsky
Yu. Kudriavtsev
A. Kolpakov
Е. Pilyuk
S. Manokhin
I. Goncharov
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