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Geert Nachtergaele
Geert Nachtergaele
Dielectric
Passivation
Silicon oxynitride
Process optimization
Taguchi methods
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Papers
3
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Silicon oxynitride layers for device passivation
1992
Johan De Baets
André Van Calster
J. Capon
Igor De Rycke
Herbert De Smet
Jan Doutreloigne
Jan Vanfleteren
Geert Nachtergaele
Sylvain Demolder
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