author-photo

Kathy Quoi

State University of New York System

6

Papers

17

Citations

Citation Trend

Filter By

Papers (5) Sort By

Journal Conference Others

Measuring multielectron beam imaging fidelity with a signal-to-noise ratio analysis

2016 Journal of Micro-nanolithography Mems and Moems
Show All
- Source
- Cite
- Save
Citations (1)
Image Simulation and Analysis to Predict the Sensitivity Performance of a Multi-Electron Beam Wafer Defect Inspection Tool

2016 Microscopy and Microanalysis
Show All
- Source
- Cite
- Save
Citations (1)
Patterned Wafer Inspection with Multi-beam SEM Technology

2016 Microscopy and Microanalysis
Show All
- Source
- Cite
- Save
Citations (0)
Enabling inspection solutions for future mask technologies through the development of massively parallel E-Beam inspection

2015
Show All
- Source
- Cite
- Save
Citations (0)
Simulating massively parallel electron beam inspection for sub-20 nm defects

2015 Proceedings of SPIE
Show All
- Source
- Cite
- Save
Citations (4)