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Auréline Bruyant
Auréline Bruyant
Nanometrology
Actuator
Interferometry
Microscopy
Optics
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Millimeter scale topographical image of highly integrated optical structures using enlarged metrological atomic-force microscopy
2010
Proceedings of SPIE
Suat Topsu
Luc Chassagne
A. Sinno
P. Ruaux
Yasser Alayli
Gilles Lerondel
Stéphane Blaize
Auréline Bruyant
Pascal Royer
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