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D.S. Gardner
D.S. Gardner
Hitachi
Electromigration
Metallurgy
Interconnection
Corrosion
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3
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24
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Encapsulated copper interconnection devices using sidewall barriers
1991
VLSI-MIC | International IEEE VLSI Multilevel Interconnection Conference
D.S. Gardner
Jin Onuki
K. Kudoo
Yutaka Misawa
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High reliability interconnections for ULSI using Al-Si-Pd-Nb/Mo layered films
1990
International Electron Devices Meeting
Jin Onuki
Yasushi Koubuchi
Shinichi Fukada
Motoo Suwa
Masahiro Koizumi
D.S. Gardner
Hitoshi Suzuki
E. Minowa
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