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Shane Harlson
Shane Harlson
Intel
Nanoparticle
Nanotechnology
Optics
Resist
Extreme ultraviolet lithography
2
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Extending resolution limits of EUV resist materials
2015
Proceedings of SPIE
Marie Krysak
Michael J. Leeson
Eungnak Han
James M. Blackwell
Shane Harlson
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