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Hubert Schulz
Hubert Schulz
Carl Zeiss AG
Materials science
Nanolithography
Electron-beam lithography
Nanoimprint lithography
Photolithography
3
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2
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Advances in 3-dimensional material characterisation using simultaneous EDS and EBSD analysis in a combined FIB-SEM microscope
2008
René de Kloe
Hubert Schulz
Felix Reinauer
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NIL template manufacturing using a variable shaped e-beam writer and a new pCAR
2006
Mathias Irmscher
Joerg Butschke
Guenter Hess
Corinna Koepernik
Florian Letzkus
Markus Renno
Holger Sailer
Hubert Schulz
Anatol Schwersenz
Ecron Thompson
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Template manufacturing for nanoimprint lithography using existing infrastructure
2005
Mathias Irmscher
Joerg Butschke
Guenter Hess
Florian Letzkus
Markus Renno
Holger Sailer
Hubert Schulz
Anatol Schwersenz
Ecron Thompson
Boris Vratzov
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