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Duwon Jeong
Duwon Jeong
Korea University of Technology and Education
Semiconductor device fabrication
Chemical vapor deposition
Junction temperature
Emissivity
Heat transfer
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A Study on the Internal Thermal Problems for Low Temperature Furnace in Semiconductor Processing
2012
Kang-Woo Joo
Duwon Jeong
Mason Suh
Kwang-Sun Kim
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