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Hartmut Prinz
Hartmut Prinz
GlobalFoundries
Materials science
Annealing (metallurgy)
Wafer
Nickel
Optoelectronics
3
Papers
7
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0
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Characterization of nickel silicide transition behavior using non-contact CGS metrology
2010
RTP | International Conference on Advanced Thermal Processing of Semiconductors
David M. Owen
Jeff Hebb
Shrinivas Shetty
Yun Wang
Van Le
Robert Binder
Rainer Giedigkeit
Stephan Waidmann
Inka Richter
Kornelia Dittmar
Hartmut Prinz
M. Weisheit
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Citations (2)
Physical and electrical properties of MOCVD and ALD deposited HfZrO4 gate dielectrics for 32nm CMOS high performance logic SOI technologies
2010
Torben Kelwing
Sergej Mutas
Martin Trentzsch
Andreas Naumann
Bernhard Trui
Lutz Herrmann
Falk Graetsch
Christoph Klein
Lutz Wilde
Susanne Ohsiek
M. Weisheit
Anita Peeva
Inka Richter
Hartmut Prinz
Alexander Wuerfel
Rick Carter
Rolf Stephan
P. Kücher
Walter Hansch
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Citations (2)
Impact of dual beam laser spike annealing parameters on nickel silicide formation characteristics
2010
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Jeffrey Mileham
Van Le
Shrinivas Shetty
Jeff Hebb
Yun Wang
Dave Owen
Robert Binder
Rainer Giedigkeit
Stephan Waidmann
Inka Richter
Kornelia Dittmar
Hartmut Prinz
M. Weisheit
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Citations (3)
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