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Takeshi Kosuge
Takeshi Kosuge
Dai Nippon Printing
Engineering
Lithography
Inspection time
Design for manufacturability
Signal-to-noise ratio
2
Papers
1
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0
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Automatic classification and defect verification based on inspection technology with lithography simulation
2015
Masaya Kato
Hideki Inuzuka
Takeshi Kosuge
Shingo Yoshikawa
Kayoko Kanno
Hidemichi Imai
Hiroyuki Miyashita
Anthony Vacca
Peter Fiekowsky
Dan Fiekowsky
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Productivity improvement of high resolution inspection mode on TeraScan 597XR
2010
Hidemichi Imai
Takeshi Kosuge
Kei Mesuda
Eiji Tsujimoto
Hideyoshi Takamizawa
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