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Jens Göckeritz
Jens Göckeritz
Qimonda
Rigorous coupled-wave analysis
Optics
Refractive index
Discretization
Plane wave
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Effects of pupil discretization and Littrow illumination in the simulation of bright-field defect detection
2009
Optics Letters
Stephan Rafler
Matthias Petschow
Uwe Seifert
Karsten Frenner
Jens Göckeritz
Wolfgang Osten
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