Old Web
English
Sign In
Acemap
>
authorDetail
>
Stephan Mechold
Stephan Mechold
Fabrication
Materials science
Optoelectronics
Scanning probe lithography
Nanolithography
3
Papers
9
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Cryogenic etching for pattern transfer into silicon of Mix-and-Match structured resist layers
2020
Microelectronic Engineering
Laura Weidenfeller
Martin R. Hofmann
Shraddha Supreeti
Stephan Mechold
Mathias Holz
Christoph Reuter
Eberhard Manske
Ivo W. Rangelow
Show All
Source
Cite
Save
Citations (1)
Mix-and-match lithography and cryogenic etching for NIL template fabrication
2020
Microelectronic Engineering
Martin Hofmann
Laura Weidenfeller
Shraddha Supreeti
Stephan Mechold
Mathias Holz
Christoph Reuter
Stefan Sinzinger
Eberhard Manske
Ivo W. Rangelow
Show All
Source
Cite
Save
Citations (6)
Atomic force microscope integrated into a scanning electron microscope for fabrication and metrology at the nanometer scale
2019
Mathias Holz
Christoph Reuter
Alexander Reum
Ahmad Ahmad
Martin R. Hofmann
Tzvetan Ivanov
Stephan Mechold
Ivo W. Rangelow
Show All
Source
Cite
Save
Citations (2)
1