author-photo

Ken Holman

National Semiconductor

2

Papers

4

Citations

Citation Trend

Filter By

Papers (2) Sort By

Journal Conference Others

Design of 200nm, 170nm, 140nm DUV contact sweeper high transmission attenuating phase shift mask : Experimental results Part 2

1999
Show All
- Source
- Cite
- Save
Citations (1)
Design of 200-nm, 170-nm, and 140-nm DUV contact sweeper high-transmission attenuating phase-shift mask: II. Experimental results

1999
Show All
- Source
- Cite
- Save
Citations (3)