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A. Michallet
A. Michallet
Electronic engineering
Optoelectronics
Engineering
Ellipsometry
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Optical properties determination of Fully Depleted Silicon On Insulator (FDSOI) substrates by ellipsometry
2015
ASMC | Advanced Semiconductor Manufacturing Conference
L. Schneider
F. Abbate
D. Le Cunff
E. Nolot
A. Michallet
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