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Francesca Perissinotti
Francesca Perissinotti
Photolithography
Photomask
Forensic engineering
Materials science
Optics
3
Papers
11
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Mask phase and transmission variation effects on wafer critical dimensions for nodes 65nm and 45nm
2010
Felix Dufaye
Stuart Gough
Frank Sundermann
Vincent Farys
Hiroyuki Miyashita
Luca Sartelli
Francesca Perissinotti
Ute Buttgereit
Sascha Perlitz
Robert Birkner
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Citations (6)
Back-glass cleaning: reducing repelliclization costs by focused action
2009
Francesca Perissinotti
Luca Sartelli
Hiroyuki Miyashita
Ming-Chien Chiu
Yu-Chang Liu
Hung-Chieh Chung
Frank Sundermann
Stuart Gough
Sonia Tourniol
Felix Dufaye
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Citations (1)
Full sulfate-free process: joint achievement of minimal residual ions and yield improvement
2007
Francesca Perissinotti
Luca Sartelli
Davide Cassago
Hiroyuki Miyashita
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Citations (4)
1