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T. Nguyen
T. Nguyen
STMicroelectronics
Doping
Engineering
Boron
Epitaxy
Electronic engineering
2
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MBIR for in-line doping metrology of epitaxial SiGe:B and SiC:P layers
2013
ASMC | Advanced Semiconductor Manufacturing Conference
Romain Duru
Delphine Le-Cunff
T. Nguyen
D. Barge
Y. Campidelli
Nicolas Laurent
Jonny Hoglund
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