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M.P.M. Jank
M.P.M. Jank
University of Jena
Ion implantation
Boron
Annealing (metallurgy)
Oxide
Gate oxide
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Gate oxide damage due to through the gate implantation in MOS-structures with ultrathin and standard oxides
2000
M.P.M. Jank
M. Lemberger
L. Frey
H. Ryssel
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