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Hiroaki Kiyokami
Hiroaki Kiyokami
Dielectric
High-κ dielectric
Plasma etching
Inductively coupled plasma
Plasma
2
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Dispositif de propulsion de véhicule
2012
Satoru Takahashi
takahasi si
Yasushi Kobiki
kobiki yasusi
Isao Sato
satou kou
Takeshi Miyagawa
miyagawa takesi
Hiroaki Kiyokami
bozhangqingshang
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Threshold energy for plasma etching of high-$k$ dielectric HfO$_{2}$ films in BCl$_{3}$-containing plasmas
2008
Bulletin of the American Physical Society
Yoshinori Ueda
Keisuke Nakamura
Hiroaki Kiyokami
Hiroaki Ohta
Koji Eriguchi
Kouichi Ono
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