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N. A. Stolwijk
N. A. Stolwijk
AST
Boron
Annealing (metallurgy)
Silicon
Supersaturation
Inorganic chemistry
3
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22
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Simulation of Rapid Thermal Annealed Boron Ultra-Shallow Junctions in Inert and Oxidizing Ambient
1998
MRS Proceedings
Wilfried Lerch
M. Glück
N. A. Stolwijk
H. Walk
M. Schäfer
Steven D. Marcus
Daniel F. Downey
Judy W. Chow
H. Marquardt
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Citations (7)
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